The degree of precision required from metrology and precision machine tools is ever-increasing. Equipment that cuts, turns, polishes and positions with nanotechnology can provide finishes and measurements within angstroms.
Ultra-precision equipment is used in many industries including semiconductor wafer processing, optics/lens manufacturing and non-standard material machining processes.
High accuracy positioning equipment including diamond turning lathes, X-Y stages and CD metrology machines typically utilize laser interferometry (position feedback) to position materials to be inspected with nanometer specifications. Additionally, equipment such as profilometers, form/contour and roughness/roundness machines are required to provide sub-micron measurements.
Machine capabilities include ultra-precision turning and microgrinding of materials such as optical glass, crystals, non-ferrous metals, polymers and ceramics. The surfaces of these materials are machined such that the results typically require little or no polishing with surfaces having sub-micron finishes. Products made via this process include CD's, contact lens tooling, optical lens components and mirrors for laser applications.
Fabreeka's® provides precision equipment manufacturers and end users with low frequency vibration and shock isolation systems to maintain the designed accuracy of this equipment.
A vibration site survey will provide the amplitudes of vibration and the frequencies at which they occur. This data is recorded, analyzed and then compared directly to the manufacturer's allowable floor vibration limits. This comparison of data enables the isolation system designer to make the correct isolator selection.
The type of isolation system chosen is based on its isolation characteristics as compared to the measured floor vibration. Typically, Fabreeka® PAL and PLM pneumatic isolators are used to isolate precision equipment. Some applications require custom systems and structural analysis and design of the support structures and frames used in conjunction with the isolation system and integrated in the machine design.
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